{"id":396,"date":"2020-12-24T18:02:07","date_gmt":"2020-12-24T09:02:07","guid":{"rendered":"https:\/\/blog.t-kougei.ac.jp\/eec\/?p=396"},"modified":"2020-12-25T00:51:34","modified_gmt":"2020-12-24T15:51:34","slug":"%e7%ac%ac%ef%bc%91%e5%9b%9e%e3%82%aa%e3%83%bc%e3%83%97%e3%83%b3%e3%82%ad%e3%83%a3%e3%83%b3%e3%83%91%e3%82%b9-2-2-2-2-2","status":"publish","type":"post","link":"https:\/\/blog.t-kougei.ac.jp\/eec\/2020\/12\/24\/396\/","title":{"rendered":"\u6b27\u6587\u8a8c Applied Physics Express:\u300c\u6700\u3082\u8aad\u307e\u308c\u305f\u8ad6\u6587\u300d"},"content":{"rendered":"<p>\u96fb\u6c17\u96fb\u5b50\u30b3\u30fc\u30b9\u306e\u8c4a\u7530\u3067\u3059\u3002\u4ee5\u524d\u3001\u672c\u30d6\u30ed\u30b0\u3067\u3001<span style=\"font-size: 14px\">\u5149\u5b66\u8a2d\u8a08\u7814\u7a76\u5ba4\u3067\u958b\u767a\u4e2d\u306e\u300c\u6975\u7d2b\u5916(EUV)\u9855\u5fae\u93e1\u300d\u306b\u95a2\u3059\u308b\u7814\u7a76\u8ad6\u6587\u3092\u7d39\u4ecb\u3057\u307e\u3057\u305f\u3002(<a href=\"https:\/\/blog.t-kougei.ac.jp\/eec\/2020\/08\/10\/333\/\">Kougei People\u3078\u306e\u30ea\u30f3\u30af<\/a>)<\/span><\/p>\n<p>\uff18\u6708\u306b\u516c\u958b\u3057\u305f\u8ad6\u6587\u306f\u300112\u670824\u65e5\u73fe\u5728\u3067\u7d041500\u56de\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u3055\u308c\u3001\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6b27\u6587\u8a8c\u300c<a href=\"https:\/\/iopscience.iop.org\/journal\/1882-0786\">Applied Physics Expess<\/a>\u300d\u306e\u300cMost read: \u6700\u3082\u8aad\u307e\u308c\u305f\u8ad6\u6587\u300d\u306e\uff13\u756a\u76ee\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n<p><a href=\"https:\/\/iopscience.iop.org\/article\/10.35848\/1882-0786\/aba882\"><img loading=\"lazy\" class=\"wp-image-401 aligncenter\" src=\"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/12\/apex_mostread.jpg\" alt=\"\" width=\"640\" height=\"516\" srcset=\"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/12\/apex_mostread.jpg 1009w, https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/12\/apex_mostread-300x242.jpg 300w, https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/12\/apex_mostread-768x620.jpg 768w\" sizes=\"(max-width: 640px) 100vw, 640px\" \/><\/a>\u3053\u306e\u8ad6\u6587\u3067\u306f\u3001\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u3084\u81ea\u52d5\u8eca\u7528\u306e\u69cb\u9020\u6750\u6599\u306a\u3069\u306b\u5fdc\u7528\u304c\u5e83\u304c\u308b\u3001\u30dd\u30ea\u30de\u30fc\u30d6\u30ec\u30f3\u30c9\u306e\u5fae\u7d30\u69cb\u9020\u3092EUV\u9855\u5fae\u93e1\u306b\u3088\u308a\u7121\u67d3\u8272\u3067\u53ef\u8996\u5316\u3067\u304d\u308b\u3053\u3068\u3092\u3001\u4e16\u754c\u306b\u5148\u99c6\u3051\u3066\u5b9f\u8a3c\u30fb\u63d0\u6848\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u307e\u3067EUV\u9855\u5fae\u93e1\u306e\u7814\u7a76\u958b\u767a\u309210\u5e74\u306b\u6e21\u308a\u9032\u3081\u307e\u3057\u305f\u304c\u3001\u3053\u306e\u3088\u3046\u306a\u5927\u304d\u306a\u53cd\u97ff\u3092\u5f97\u305f\u306e\u306f\u521d\u3081\u3066\u3067\u3059\u3002\u3053\u308c\u306f\u3001\u9855\u5fae\u93e1\u304c\u8981\u7d20\u6280\u8853\u958b\u767a\u306e\u6bb5\u968e\u3092\u8d8a\u3048\u6210\u719f\u5316\u3057\u3001\u30e6\u30fc\u30b6\u30fc\u3068\u306a\u308a\u3046\u308b\u76ee\u5229\u304d\u306e\u7814\u7a76\u8005\u304c\u3001\u305d\u306e\u512a\u308c\u305f\u7279\u6027\u306b\u6c17\u3065\u304d\u3064\u3064\u3042\u308b\u3053\u3068\u304c\u539f\u56e0\u3068(\u52dd\u624b\u306b\uff1f)\u60f3\u50cf\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>EUV\u9855\u5fae\u93e1\u306f<span style=\"font-size: 14px\">\u4eba\u985e\u304c\u958b\u767a\u3057\u305f\u6700\u3082\u7cbe\u5bc6\u306a\u5149\u5b66\u88c5\u7f6e\u306e\u4e00\u3064\u3067\u3001\u305d\u306e<\/span><span style=\"font-size: 14px\">\u958b\u767a\u306f\u5352\u696d\u7814\u7a76\u30fb\u4fee\u58eb\u8ad6\u6587\u7814\u7a76\u3068\u3057\u3066\u3001\u305d\u306e\u5168\u3066\u3092\uff08\uff13\uff10\u4eba\u3092\u8d85\u3048\u308b\uff09\u5b66\u751f\u304c\u884c\u3063\u3066\u304d\u307e\u3057\u305f\u3002\u958b\u767a\u3092\u901a\u3057\u6210\u9577\u3057\u305f\u5b66\u751f\u306f\u3001\u7686\u3055\u3093\u5149\u5b66\u3001\u96fb\u6c17\u3084\u6a5f\u68b0\u5206\u91ce\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u3068\u3057\u3066\u6d3b\u8e8d\u3057\u3066\u3044\u307e\u3059\u3002EUV\u9855\u5fae\u93e1\u306f\u3001<\/span><span style=\"font-size: 14px\">\u30aa\u30fc\u30d7\u30f3\u30ad\u30e3\u30f3\u30d1\u30b9\u306e\u7814\u7a76\u5ba4\u898b\u5b66\u306a\u3069\u3067\u968f\u6642\u516c\u958b\u3057\u3066\u3044\u307e\u3059\u3002<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"\u96fb\u6c17\u96fb\u5b50\u30b3\u30fc\u30b9\u306e\u8c4a\u7530\u3067\u3059\u3002\u4ee5\u524d\u3001\u672c\u30d6\u30ed\u30b0\u3067\u3001\u5149\u5b66\u8a2d\u8a08\u7814\u7a76\u5ba4\u3067\u958b\u767a\u4e2d\u306e\u300c\u6975\u7d2b\u5916(EUV)\u9855\u5fae\u93e1\u300d\u306b\u95a2\u3059\u308b\u7814\u7a76\u8ad6\u6587\u3092\u7d39\u4ecb\u3057\u307e\u3057\u305f\u3002(Kougei People\u3078\u306e\u30ea\u30f3\u30af) \uff18\u6708\u306b\u516c\u958b\u3057\u305f\u8ad6\u6587\u306f\u300112\u670824\u65e5\u73fe\u5728\u3067\u7d041500\u56de [&hellip;]","protected":false},"author":174,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[3],"tags":[],"_links":{"self":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts\/396"}],"collection":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/users\/174"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/comments?post=396"}],"version-history":[{"count":12,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts\/396\/revisions"}],"predecessor-version":[{"id":417,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts\/396\/revisions\/417"}],"wp:attachment":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/media?parent=396"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/categories?post=396"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/tags?post=396"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}