{"id":333,"date":"2020-08-10T23:34:00","date_gmt":"2020-08-10T14:34:00","guid":{"rendered":"https:\/\/blog.t-kougei.ac.jp\/eec\/?p=333"},"modified":"2020-08-10T23:35:48","modified_gmt":"2020-08-10T14:35:48","slug":"%e7%ac%ac%ef%bc%91%e5%9b%9e%e3%82%aa%e3%83%bc%e3%83%97%e3%83%b3%e3%82%ad%e3%83%a3%e3%83%b3%e3%83%91%e3%82%b9-2-2-2-2","status":"publish","type":"post","link":"https:\/\/blog.t-kougei.ac.jp\/eec\/2020\/08\/10\/333\/","title":{"rendered":"EUV\u9855\u5fae\u93e1\u306e\u5b66\u8853\u8ad6\u6587\u304c\u516c\u958b\u3055\u308c\u307e\u3057\u305f"},"content":{"rendered":"<p><img loading=\"lazy\" class=\" wp-image-334 aligncenter\" src=\"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/08\/24305-701x1024.jpg\" alt=\"\" width=\"314\" height=\"459\" srcset=\"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/08\/24305-701x1024.jpg 701w, https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/08\/24305-205x300.jpg 205w, https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/08\/24305-768x1121.jpg 768w, https:\/\/blog.t-kougei.ac.jp\/eec\/wp-content\/uploads\/sites\/44\/2020\/08\/24305.jpg 1024w\" sizes=\"(max-width: 314px) 100vw, 314px\" \/>\u96fb\u6c17\u96fb\u5b50\u30b3\u30fc\u30b9\u306e\u8c4a\u7530\u3067\u3059\u30028\u67084\u65e5\u306b\u3001\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u82f1\u6587\u8a8c\u300cApplied Physics Express\u300d\u306b\u3001\u5149\u5b66\u8a2d\u8a08\u7814\u7a76\u5ba4\u3067\u958b\u767a\u4e2d\u306e\u300c\u6975\u7d2b\u5916(EUV)\u9855\u5fae\u93e1\u300d\u306b\u95a2\u3059\u308b\u7814\u7a76\u8ad6\u6587\u304c\u516c\u958b\u3055\u308c\u307e\u3057\u305f(\u4e0a\u306e\u5199\u771f\u306f\u958b\u767a\u4e2d\u306e\u9855\u5fae\u93e1\u3067\u3059)\u3002\u8a73\u3057\u304f\u306f\u3001\u4ee5\u4e0b\u306e\u30ea\u30f3\u30af\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n<p><a href=\"https:\/\/iopscience.iop.org\/article\/10.35848\/1882-0786\/aba882\">https:\/\/iopscience.iop.org\/article\/10.35848\/1882-0786\/aba882<\/a><\/p>\n<p>\u3053\u306e\u8ad6\u6587\u3067\u306f\u3001\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u3084\u81ea\u52d5\u8eca\u7528\u306e\u69cb\u9020\u6750\u6599\u306a\u3069\u306b\u5fdc\u7528\u304c\u5e83\u304c\u308b\u3001\u30dd\u30ea\u30de\u30fc\u30d6\u30ec\u30f3\u30c9\u306e\u5fae\u7d30\u69cb\u9020\u3092EUV\u9855\u5fae\u93e1\u306b\u3088\u308a\u7121\u67d3\u8272\u3067\u53ef\u8996\u5316\u3067\u304d\u308b\u3053\u3068\u3092\u3001\u4e16\u754c\u306b\u5148\u99c6\u3051\u3066\u5b9f\u8a3c\u30fb\u63d0\u6848\u3057\u307e\u3057\u305f\u3002\u7814\u7a76\u306e\u63a8\u9032\u306b\u306f\u3001\u6628\u5e74\u5ea6\u307e\u3067\u5927\u5b66\u9662\u7814\u7a76\u751f\u3068\u3057\u3066\u5149\u5b66\u8a2d\u8a08\u7814\u7a76\u5ba4\u306b\u6240\u5c5e\u3057\u305f\u76f8\u6fa4\u3055\u3093\u306e\u6d3b\u8e8d\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u8a18\u4e8b\u3092\u66f8\u3044\u3066\u3044\u308b\u30018\u670810\u65e5\u307e\u3067\u306e6\u65e5\u9593\u3067\u8ad6\u6587\u306f250\u56de\u4ee5\u4e0a\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u3055\u308c\u3066\u3044\u3066\u3001\u95a2\u5fc3\u306e\u9ad8\u3055\u306b\u5c11\u3005\u3001\u9a5a\u3044\u3066\u3044\u307e\u3059\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"\u96fb\u6c17\u96fb\u5b50\u30b3\u30fc\u30b9\u306e\u8c4a\u7530\u3067\u3059\u30028\u67084\u65e5\u306b\u3001\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u82f1\u6587\u8a8c\u300cApplied Physics Express\u300d\u306b\u3001\u5149\u5b66\u8a2d\u8a08\u7814\u7a76\u5ba4\u3067\u958b\u767a\u4e2d\u306e\u300c\u6975\u7d2b\u5916(EUV)\u9855\u5fae\u93e1\u300d\u306b\u95a2\u3059\u308b\u7814\u7a76\u8ad6\u6587\u304c\u516c\u958b\u3055\u308c\u307e\u3057\u305f(\u4e0a\u306e\u5199\u771f\u306f\u958b\u767a\u4e2d\u306e\u9855\u5fae\u93e1\u3067 [&hellip;]","protected":false},"author":174,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[3],"tags":[],"_links":{"self":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts\/333"}],"collection":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/users\/174"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/comments?post=333"}],"version-history":[{"count":5,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts\/333\/revisions"}],"predecessor-version":[{"id":339,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/posts\/333\/revisions\/339"}],"wp:attachment":[{"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/media?parent=333"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/categories?post=333"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.t-kougei.ac.jp\/eec\/wp-json\/wp\/v2\/tags?post=333"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}